Title:
BULK ACOUSTIC RESONATOR AND MANUFACTURING METHOD THEREFOR, FILTER, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/021844
Kind Code:
A1
Abstract:
The present invention relates to a bulk acoustic resonator and a manufacturing method therefor. The resonator comprises a substrate, a bottom electrode, an acoustic mirror, a top electrode, and a piezoelectric layer. The bottom electrode comprises a first electrode layer and a second electrode layer, a gap layer is arranged between the first electrode layer and the second electrode layer, the gap layer defines the acoustic mirror of the resonator, and a part of the second electrode layer is located above the gap layer; and a protrusion structure and/or a recess structure is formed on the upper surface of the second electrode layer along an effective area of the resonator. The present invention also relates to a filter and an electronic device.
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Inventors:
HUANG YUANQING (CN)
ZHANG WEI (CN)
HAO LONG (CN)
JIANG XINGYONG (CN)
JI YANLI (CN)
MA XIAODAN (CN)
ZHENG ZHIQIANG (CN)
ZHANG LANYUE (CN)
ZHANG WEI (CN)
HAO LONG (CN)
JIANG XINGYONG (CN)
JI YANLI (CN)
MA XIAODAN (CN)
ZHENG ZHIQIANG (CN)
ZHANG LANYUE (CN)
Application Number:
PCT/CN2023/097313
Publication Date:
February 01, 2024
Filing Date:
May 31, 2023
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/02
Foreign References:
| CN115765675A | 2023-03-07 | |||
| CN114070248A | 2022-02-18 | |||
| CN111245394A | 2020-06-05 | |||
| CN111082777A | 2020-04-28 | |||
| CN114070224A | 2022-02-18 | |||
| CN114696774A | 2022-07-01 | |||
| US20070008050A1 | 2007-01-11 |
Attorney, Agent or Firm:
BEIJING JINCHENGTONGDA & NEAL LAW FIRM (CN)
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