Title:
BULK ACOUSTIC WAVE RESONANCE APPARATUS AND METHOD FOR FORMING SAME
Document Type and Number:
WIPO Patent Application WO/2024/061071
Kind Code:
A1
Abstract:
A bulk acoustic wave resonance apparatus and a method for forming same, relating to the technical field of semiconductor manufacturing. The bulk acoustic wave resonance apparatus comprises: a substrate (200); an intermediate layer (201), the intermediate layer (201) comprising a first side (201a) and a second side (201b) opposite to each other, the substrate (200) being located on the first side (201a), the intermediate layer (201) comprising a cavity (202), and an opening of the cavity (202) being located on the second side (201b); an electrode structure (205) located in the cavity (202); and a piezoelectric layer (204) located on the second side (201b) and located on the electrode structure (205), the piezoelectric layer (204) at least covering the cavity (202). Since the electrode structure (205) is located in the cavity (202), the piezoelectric layer (204) can provide a relatively flat surface for a subsequently formed frequency modulation layer, thereby reducing lattice defects of a thin film of the frequency modulation layer, improving the quality of the thin film, and further allowing the frequency modulation layer to be more flexible and accurate in controlling the frequency of a device.
Inventors:
TANG ZHENGJIE (CN)
ZOU YALI (CN)
YANG XINYU (CN)
ZOU YALI (CN)
YANG XINYU (CN)
Application Number:
PCT/CN2023/118474
Publication Date:
March 28, 2024
Filing Date:
September 13, 2023
Export Citation:
Assignee:
CHANGZHOU CHEMSEMI CO LTD (CN)
International Classes:
H03H9/17; H03H3/04; H03H9/02; H03H9/13
Foreign References:
| CN115242215A | 2022-10-25 | |||
| CN111371429A | 2020-07-03 | |||
| CN114337581A | 2022-04-12 | |||
| CN114342255A | 2022-04-12 | |||
| CN114362712A | 2022-04-15 | |||
| US20210111699A1 | 2021-04-15 |
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW CO., LTD. (CN)
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