BULK ELASTIC WAVE RESONATOR

WIPO Patent Application WO/2012/073829

A1

Provided is a bulk elastic wave resonator that is easily manufactured and has variable frequency. The bulk elastic wave resonator comprises: (a) a substrate (30); (b) a resonator part (20) having a piezoelectric film (12) sandwiched between a pair of electrodes (14, 16), the resonator part having an oscillating region (15) where the electrodes (14, 16) overlap as viewed from the film thickness direction; (c) a supporter (22) for connecting the substrate (30) and the resonator part (20) and elastically deforming; (d) a membrane (40) that is disposed between the resonator part (20) and the substrate (30), facing the oscillating region (15) of the resonator part (20), and is fixed to the substrate (30) with space between the membrane and the substrate (30); and (e) actuators (13, 44) for moving the resonator part (20) toward and away from the substrate (30), the actuators being formed in the resonator part (20) and the substrate (30) adjacent to the oscillating region (15) and the membrane (40). The oscillating region (15) of the resonator part (20) comes into contact with the membrane (40) when the actuators (13, 44) cause the resonator part (20) to approach the substrate (30).

JPH0523617	[Name of invention] Piezoelectric resonator
JP6538007	Elastic wave device
JP3472474	THIN PIEZOELECTRIC RESONATOR AND MOUNTING STRUCTURE THEREOF

KAWAI HIROSHI (JP)
YOSHIDA KOICHI (JP)
YATANI NAOTO (JP)
INAI MAKOTO (JP)

PCT/JP2011/077206

June 07, 2012

November 25, 2011

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MURATA MANUFACTURING CO (JP)
KAWAI HIROSHI (JP)
YOSHIDA KOICHI (JP)
YATANI NAOTO (JP)
INAI MAKOTO (JP)

H03H9/17; H01L41/09; H01L41/18; H03H9/02

JP2010516213A	2010-05-13
JP2005528010A	2005-09-15
JP2000030595A	2000-01-28
JPH08186467A	1996-07-16

YAMAMOTO TOSHINORI (JP)
Toshinori Yamamoto (JP)

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