Title:
CAPACITANCE TYPE PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2010/113803
Kind Code:
A1
Abstract:
Provided is a capacitance type pressure sensor wherein a zero-point shift is suppressed by suppressing warpage of a pressure sensitive diaphragm even when a medium to be measured is adhered and accumulated on the pressure sensitive diaphragm.
A capacitance type pressure sensor (10) is provided with a pressure sensor chip which has a diaphragm structure and detects a capacitance corresponding to the pressure of the medium to be measured. In the capacitance type pressure sensor, one surface (111b) of the sensor diaphragm (111) of the pressure sensor is on the side of a pressure introducing chamber which introduces the medium to be measured, and the other surface (111a) is on the side of a capacitor chamber which forms a capacitor section, and the rigidity of the sensor diaphragm is reduced toward the center portion (111g) from the peripheral portion (111f) which forms the boundary to diaphragm fixing sections (16, 17) on the capacitor chamber side.
Inventors:
ISHIHARA TAKUYA (JP)
SASHINAMI NOBUO (JP)
SASHINAMI NOBUO (JP)
Application Number:
PCT/JP2010/055385
Publication Date:
October 07, 2010
Filing Date:
March 26, 2010
Export Citation:
Assignee:
YAMATAKE CORP (JP)
ISHIHARA TAKUYA (JP)
SASHINAMI NOBUO (JP)
ISHIHARA TAKUYA (JP)
SASHINAMI NOBUO (JP)
International Classes:
G01L9/12
Foreign References:
| JP2002107254A | 2002-04-10 | |||
| JP2008107214A | 2008-05-08 | |||
| JP2005337924A | 2005-12-08 | |||
| JP2004323994A | 2004-11-18 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
Yoshiyuki Inaba (JP)
Yoshiyuki Inaba (JP)
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