Title:
CAPACITANCE-TYPE PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2019/098001
Kind Code:
A1
Abstract:
The pressure sensor according to the present invention is a capacitance-type pressure sensor, wherein the pressure sensor is characterized by having: a flexible substrate having a first electrode and a second electrode provided in a region on part of one surface, the flexible substrate being flexible; and a hard substrate provided with a third electrode that faces the first electrode and second electrode and is disposed so as to be set apart from the same; the flexible substrate and the hard substrate being joined at opposing surfaces, and the area of the region on the part of the one surface where the first electrode and second electrode are provided being greater in plan view than the area of the hard substrate.
Inventors:
YAMAMOTO JUNYA (JP)
MASUDA TAKAHIRO (JP)
MIYAHARA CHIHIRO (JP)
MASUDA TAKAHIRO (JP)
MIYAHARA CHIHIRO (JP)
Application Number:
PCT/JP2018/040148
Publication Date:
May 23, 2019
Filing Date:
October 29, 2018
Export Citation:
Assignee:
OMRON TATEISI ELECTRONICS CO (JP)
International Classes:
G01L1/14; G01L5/00
Foreign References:
| JP2005207993A | 2005-08-04 | |||
| JPH0875571A | 1996-03-22 | |||
| JP2000065516A | 2000-03-03 | |||
| US5656785A | 1997-08-12 | |||
| JP6308605B1 | 2018-04-11 |
Attorney, Agent or Firm:
IP FIRM SHUWA (JP)
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