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Title:
CAPACITOR ELEMENT AND METHOD FOR TRIMMING A CAPACITOR ELEMENT
Document Type and Number:
WIPO Patent Application WO2003054961
Kind Code:
A3
Abstract:
A capacitor element on a chip, e.g. a MMIC chip, comprises a main capacitance in parallel with a series configuration of trimming capacitors. The total capacitance in parallel with a series configuration of trimming capacitors. The total capacitance value of the parallel arrangement can be increased from its inherently minimum value by applying one or more laser pulses to one or more of the trimming capacitors, such that in each case a short-circuit is produced between the metallization layer to which the pulse is applied and the other metallization layer making up the trimming capacitor.

Inventors:
KERN STEFAN (DE)
TRAUTWEIN MARCO (DE)
SCHALLNER MARTIN (DE)
Application Number:
PCT/IB2002/005756
Publication Date:
November 20, 2003
Filing Date:
December 16, 2002
Export Citation:
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Assignee:
MARCONI COMM GMBH (DE)
KERN STEFAN (DE)
TRAUTWEIN MARCO (DE)
SCHALLNER MARTIN (DE)
International Classes:
H01G4/255; H01L27/08; (IPC1-7): H01L27/08; H01L21/02
Domestic Patent References:
WO2001093283A12001-12-06
Foreign References:
US6198619B12001-03-06
EP0461417A21991-12-18
US5883437A1999-03-16
Other References:
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 02 26 February 1999 (1999-02-26)
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 05 30 April 1998 (1998-04-30)
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 06 30 April 1998 (1998-04-30)
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 11 28 November 1997 (1997-11-28)
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