Title:
CARBON NANOTUBE SENSOR PRODUCTION METHOD FOR REMOVING GATING HYSTERESIS
Document Type and Number:
WIPO Patent Application WO/2016/072557
Kind Code:
A1
Abstract:
The present invention provides a carbon nanotube sensor production method comprising the steps of: (a) forming an insulating film on a substrate; (b) forming multiple electrodes on the insulating film; (c) forming an OTS film on the insulating film; and (d) adsorbing carbon nanotube particles on the electrodes.
Inventors:
BYUN YOUNG TAE (KR)
KIM SUN HO (KR)
JHON YOUNG MIN (KR)
LEE JE HAENG (KR)
KIM JAE SEONG (KR)
PARK MIN CHUL (KR)
KIM SUN HO (KR)
JHON YOUNG MIN (KR)
LEE JE HAENG (KR)
KIM JAE SEONG (KR)
PARK MIN CHUL (KR)
Application Number:
PCT/KR2015/000196
Publication Date:
May 12, 2016
Filing Date:
January 08, 2015
Export Citation:
Assignee:
KOREA INST SCI & TECH (KR)
International Classes:
G01N27/02; G01N27/26; H01L21/336
Foreign References:
| KR20120126586A | 2012-11-21 | |||
| KR20140110493A | 2014-09-17 | |||
| KR20140128203A | 2014-11-05 | |||
| KR20110081683A | 2011-07-14 | |||
| KR20100113698A | 2010-10-22 |
Attorney, Agent or Firm:
TNI IP LAW FIRM (KR)
특허법인 티앤아이 (KR)
특허법인 티앤아이 (KR)
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