CARRIER HEAD WITH POROSE RETAINER RING

Title:

CARRIER HEAD WITH POROSE RETAINER RING

Document Type and Number:

WIPO Patent Application WO2003002299

Kind Code:

A3

Abstract:

A material (26) with a mesh of fibers and a binder material holding the fibers in the mesh can be used on a carrier head (20) or a polishing pad (100). A polishing apparatus can include a pad cleaner (40) with nozzles (44) to direct jets of cleaning fluid onto the polishing pad (100) and a brush (49)to agitate a surface of the polishing pad (100).

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JP2009066749	ABRASIVE CLOTH AND METHOD FOR MANUFACTURING THE SAME
JP5896925	Polished article, its manufacturing method and its usage

Inventors:

TOLLES ROBERT D

Application Number:

PCT/US2002/020885

Publication Date:

November 06, 2003

Filing Date:

July 01, 2002

Export Citation:

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Assignee:

APPLIED MATERIALS INC (US)

International Classes:

B24B37/24; B24B37/26; B24B37/32; B24B53/007; B24B53/017; B24D3/32; B24D3/34; B24D9/08; B24D13/14; (IPC1-7): B24B37/04; B24B41/06; B24B53/007

Foreign References:

US6019670A	2000-02-01
US5958794A	1999-09-28
EP0239040A1	1987-09-30

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