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Title:
CAVITY STRUCTURE OF CONTINUOUS ATOMIC LAYER DEPOSITION (ALD) COATING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/178949
Kind Code:
A1
Abstract:
The present invention relates to the field of ALD. Provided is a cavity structure of a continuous ALD coating apparatus. The cavity structure includes a box assembly and a sealing assembly, wherein the box assembly comprises a heating cavity, a connecting cavity and a cooling cavity, which are sequentially connected, and a coating cavity configured in the connecting cavity; the box assembly further comprises a first access door configured in the connecting cavity; the sealing assembly comprises six insertion plate doors configured on the box assembly; the first insertion plate door and the second insertion plate door are respectively used for communicating with a coating chamber and a connecting chamber; the third insertion plate door is used for communicating with a heating chamber and the connecting chamber; the fourth insertion plate door is used for communicating with the connecting chamber and a cooling chamber; the fifth insertion plate door is used for communicating with the exteriors of the heating chamber and the heating cavity; and the sixth insertion plate door is used for communicating with the exteriors of the cooling chamber and the cooling cavity. Sealing is performed by means of the six insertion plate doors, thereby greatly reducing the length of the cavity structure, and reducing the occupied area.

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Inventors:
TIAN YUFENG (CN)
Application Number:
PCT/CN2022/119527
Publication Date:
September 28, 2023
Filing Date:
September 19, 2022
Export Citation:
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Assignee:
XIAMEN YUNMAO TECH CO LTD (CN)
International Classes:
C23C16/44; C23C16/455; C23C16/54
Foreign References:
CN114657538A2022-06-24
CN102560426A2012-07-11
CN101736317A2010-06-16
CN209260200U2019-08-16
CN103801693A2014-05-21
CN106011790A2016-10-12
US20120009348A12012-01-12
JPH0669140A1994-03-11
JP2010159463A2010-07-22
JPH11330199A1999-11-30
Attorney, Agent or Firm:
XIAMEN WISDOM INTELLECTUAL PROPERTY FIRM (GENERAL PARTNERSHIP) (CN)
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