Title:
CONTINUOUS ATOMIC LAYER DEPOSITION (ALD) COATING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/178948
Kind Code:
A1
Abstract:
Provided is a continuous ALD coating apparatus, belonging to the technical field of ALD. The continuous ALD coating apparatus includes a box assembly, a vacuum assembly, a driving assembly and a detection assembly, wherein the box assembly comprises a heating cavity (12), a connecting cavity (5) and a cooling cavity (9), which are sequentially connected; the heating cavity (12) is provided with a heating chamber (6); a coating chamber (10) for coating a workpiece is arranged in the connecting cavity (5); the cooling cavity (9) is provided with a cooling chamber (3); the heating chamber (6) and the cooling chamber (3) can respectively communicate with the coating chamber (10); the vacuum assembly is jointed with the box assembly and is used for creating a vacuum, so that the heating chamber (6) and the cooling chamber (3) can be in vacuum connection with the coating chamber (10); the driving assembly is jointed with the box assembly, and is used for driving the workpiece to move between the heating chamber (6), the coating chamber (10) and the cooling chamber (3); and the detection assembly is jointed with the box assembly, and is used for detecting the workpiece or a bearing disc assembly (7) for bearing the workpiece. The coating chamber (10) is always in a vacuum state and may not come into contact with outside air; therefore, the cleanliness during a production process is improved greatly, product quality is improved, and there is great practical significance.
Inventors:
TIAN YUFENG (CN)
Application Number:
PCT/CN2022/119525
Publication Date:
September 28, 2023
Filing Date:
September 19, 2022
Export Citation:
Assignee:
XIAMEN YUNMAO TECH CO LTD (CN)
International Classes:
C23C16/44; C23C14/32; C23C14/34; C23C16/455; C23C16/46
Foreign References:
| CN207331047U | 2018-05-08 | |||
| CN107326334A | 2017-11-07 | |||
| CN114657537A | 2022-06-24 | |||
| CN109518153A | 2019-03-26 | |||
| US20080041314A1 | 2008-02-21 |
Attorney, Agent or Firm:
XIAMEN WISDOM INTELLECTUAL PROPERTY FIRM (GENERAL PARTNERSHIP) (CN)
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