Title:
CHARGED-PARTICLE BEAM APPARATUS
Document Type and Number:
WIPO Patent Application WO/2020/021649
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a charged-particle beam apparatus that enables a user to easily and quickly bring up a necessary function on a GUI. The charged-particle beam apparatus according to the present invention presents, in accordance with an operation history thereof, operation components that are recommended to be placed on a component set (see figure 5).
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Inventors:
KOMATSUZAKI RYO (JP)
SAWADA ATSUSHI (JP)
SAWADA ATSUSHI (JP)
Application Number:
PCT/JP2018/027859
Publication Date:
January 30, 2020
Filing Date:
July 25, 2018
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/24
Domestic Patent References:
| WO2010084860A1 | 2010-07-29 |
Foreign References:
| JP2011054286A | 2011-03-17 | |||
| JPH05299050A | 1993-11-12 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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