Title:
CHARGED PARTICLE BEAM DEVICE, IMAGE GENERATION METHOD, OBSERVATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2015/118785
Kind Code:
A1
Abstract:
Provided is a charged particle beam device capable of observing the interior and the surface of a sample in a simple manner. This charged particle beam device operates in a transmitted charged particle image mode and a secondary charged particle image mode. In the transmitted charged particle image mode, a transmitted charged particle image is produced on the basis of a detection signal (512) associated with light emitted from a light-emitting member (500) that emits light upon being irradiated with transmitted charged particles transmitted through the interior of a sample (6). In the secondary charged particle image mode, a secondary charged particle image is produced on the basis of a detection signal (518) caused by reflected charged particles or secondary charged particles (517) from the sample (6).
Inventors:
OMINAMI YUSUKE (JP)
KATANE JUNICHI (JP)
KAWANISHI SHINSUKE (JP)
ITO SUKEHIRO (JP)
KATANE JUNICHI (JP)
KAWANISHI SHINSUKE (JP)
ITO SUKEHIRO (JP)
Application Number:
PCT/JP2014/084019
Publication Date:
August 13, 2015
Filing Date:
December 24, 2014
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/244; H01J37/18; H01J37/28
Foreign References:
| JPH10283978A | 1998-10-23 | |||
| JP2010182550A | 2010-08-19 |
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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