Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/114033
Kind Code:
A1
Abstract:
In a side entry type sample holder, vibrations in the radial direction of the sample holder provoke a resolving power decrease in the measurement results.
In the present invention, the side entry type sample holder (105) has a stepped portion (210) in the radial direction of an axial portion. The sample stage (104) has a support part (213) contacting the stepped portion (210) in a cylindrical portion (202) capable of moving as one body in the axis direction of the sample holder (105), and, through the contact between the stepped portion (210) and the support part (213), a frictional force is generated, opposing the radial direction of the axial portion in the sample holder. In this manner, the vibrations in the radial direction of the sample holder are suppressed, and the resolving power decrease in the measurement results is suppressed.
Inventors:
YABATA KIYOSHI (JP)
KIKUCHI HIDEKI (JP)
MARUYAMA NAOTOMO (JP)
KIKUCHI HIDEKI (JP)
MARUYAMA NAOTOMO (JP)
Application Number:
PCT/JP2015/084230
Publication Date:
July 21, 2016
Filing Date:
December 07, 2015
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/20
Foreign References:
| JP2014089936A | 2014-05-15 | |||
| JP2010157491A | 2010-07-15 | |||
| JPH01129754U | 1989-09-04 | |||
| JPS5615567U | 1981-02-10 | |||
| JP2014038786A | 2014-02-27 |
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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