Title:
CHARGED PARTICLE BEAM RENDERING DEVICE, CHARGED PARTICLE BEAM RENDERING SYSTEM, AND RENDERING DATA GENERATING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/131119
Kind Code:
A1
Abstract:
[Problem] To facilitate management of rendering data which was subjected to correction processing. [Solution] A charged particle beam rendering device 1 is provided with the following: a beam generating unit 7 that generates a charged particle beam; an aperture unit 16 that includes a plurality of openings and that allows a charged particle beam to pass through the openings thereby generating a multi-beam which includes a plurality of micro-beams; a projection system 4 that projects, in a reduced manner, the multi-beam onto a rendering subject; a blanking unit 17 that is interposed between the aperture unit and the projection unit and that carries out control so as to direct the plurality of micro-beams towards the projection system or a direction different from that of the projection system; a control unit 41 that controls the beam generating unit, the projection system, and the blanking unit; an acquisition unit 42 that acquires first rendering data of a vector format for performing rendering on the rendering subject; a first image conversion unit 43 that converts the first rendering data to second rendering data of a raster format; an image correction unit 44 that corrects the second rendering data in pixel units to generate third rendering data of a raster format; a second image conversion unit 45 that converts the third rendering data to fourth rendering data of a vector format; and a first storage control unit 46 that carries out control for saving the fourth rendering data in a first rendering data storage unit 47.
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Inventors:
SHIMOMURA TAKEYA (JP)
OKAWA YOUHEI (JP)
OKAWA YOUHEI (JP)
Application Number:
PCT/JP2017/002815
Publication Date:
August 03, 2017
Filing Date:
January 26, 2017
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD (JP)
International Classes:
H01L21/027; G03F7/20; H01J37/305
Foreign References:
| JP2014049467A | 2014-03-17 | |||
| JP2015162504A | 2015-09-07 | |||
| US20150242563A1 | 2015-08-27 | |||
| JP2008242885A | 2008-10-09 | |||
| JP2006251160A | 2006-09-21 | |||
| JP2002528911A | 2002-09-03 |
Attorney, Agent or Firm:
NAGAI Hiroshi et al. (JP)
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