CHARGED PARTICLE GENERATOR AND ACCELERATOR

WIPO Patent Application WO/2006/070744

A1

A charged particle generator having a structure hardly causing electric discharge to the outside and an accelerator having such a charged particle generator and an acceleration tube. The charged particle generator (1) comprises a first box-shaped insulating member (4) having an opening at its top, a second box-shaped insulating member (5) placed in the first box-shaped insulating member (4) and having an opening at its top and a side wall (13) and a bottom portion (14) spaced predetermined distance from the outside adjacent side wall (10) and the bottom portion (9) of the first box-shaped insulating member (4), and an inverted box-shaped insulating member (7) having an opening at its bottom and a side wall (21) inserted in the space between the side walls (10, 13) of the first and second box-shaped insulating members (4, 5). Charged particles generated from a charged particle source (2) installed inside the second box-shaped insulating member (5) are made to emerge through emerging holes (11, 17) formed in the bottom portions (9, 14) of the first and second box-shaped insulating members (4, 5).

JP2005050579	CHARGED PARTICLE BEAM DEVICE
JPH1040853	ION-IMPLANTING DEVICE
JP3325557	[Title of Invention] Charged Particle Beam Device

NISHINO SHIGEHIRO (JP)
ONO RYOICHI (JP)

PCT/JP2005/023787

July 06, 2006

December 26, 2005

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KYOTO INST OF TECHNOLOGY (JP)
NISHINO SHIGEHIRO (JP)
ONO RYOICHI (JP)

H01J37/16; G21K1/00; H01J27/02; H01J37/04; H01J37/08; H05H5/03

JPH0384839A	1991-04-10
JP2000123635A	2000-04-28
JPH0462729A	1992-02-27
JPS63170818A	1988-07-14
JPH03105835A	1991-05-02
JP2003217999A	2003-07-31
JPH10188872A	1998-07-21

Watanabe, Mitsuhiko (11-8 Sonezaki 2-chome, Kita-k, Osaka-shi Osaka 57, JP)

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