METHOD FOR FORMING LIGHT ABSORBING LAYER IN CIS-BASED THIN FILM SOLAR BATTERY

Title:

METHOD FOR FORMING LIGHT ABSORBING LAYER IN CIS-BASED THIN FILM SOLAR BATTERY

Document Type and Number:

WIPO Patent Application WO/2006/070745

Kind Code:

A1

Abstract:

This invention provides a method for forming a light absorbing layer in a CIS-based thin film solar battery, which, in a simple apparatus, the temperature within the apparatus can be rendered uniform and can improve contact between a reactive gas and selenium and sulfur. A fan (3) as an atmosphere homogenization means is provided within the apparatus. Further, objects are arranged by a method which can render the convection of the reactive gas smooth. Specifically, a plurality of flat-plate objects (2) are arranged while providing given spacing between the objects in such a manner that the objects are parallel to the longitudinal direction of the apparatus with the plate face being perpendicular thereto. Further, an internal flow passage is provided within the group of objects, and a gas flow passage is provided on the upper part, the lower part, and both sides. According to the above construction, each object can easily come into contact with the reactive gas within the apparatus, the temperature within the apparatus becomes uniform, and the contact between the reactive gas and selenium and sulfur is improved.

Inventors:

ONODERA MASARU
KURIYAGAWA SATORU
TANAKA YOSHIAKI

Application Number:

PCT/JP2005/023791

Publication Date:

July 06, 2006

Filing Date:

December 26, 2005

Export Citation:

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Assignee:

SHOWA SHELL SEKIYU (JP)
ONODERA MASARU
KURIYAGAWA SATORU
TANAKA YOSHIAKI

International Classes:

H01L31/04; H01L21/365

Foreign References:

JPH0294669A	1990-04-05
JP2003165735A	2003-06-10
JP2001187332A	2001-07-10
JPH10135495A	1998-05-22
JP2002243368A	2002-08-28
JPS61237476A	1986-10-22
JP2004327653A	2004-11-18

Other References: