CHARGED PARTICLE IRRADIATING DEVICE, SYSTEM, METHOD, AND PROGRAM

Title:

CHARGED PARTICLE IRRADIATING DEVICE, SYSTEM, METHOD, AND PROGRAM

Document Type and Number:

WIPO Patent Application WO/2021/117719

Kind Code:

A1

Abstract:

[Problem] To provide a charged particle irradiating device or the like that enables a charged object to quickly approach a target charged state. [Solution] Provided is a charged particle irradiating device comprising: a pre-irradiation state detection unit which detects a pre-irradiation charged state, which is a charged state of a charged object before being irradiated with charged particles; a trained model which inputs the charged state of the charged object and control parameters related to a control amount used to control the charged particles with which the charged object is irradiated, and generates an estimated charged state that is the charged state of the charged object irradiated with the charged particles controlled under the control parameters; an estimated charged state generation unit which inputs the pre-irradiation charged state and a plurality of control parameters to the trained model, and generates a plurality of estimated charged states corresponding to the pre-irradiation charged state and the plurality of control parameters; a selection unit which selects an estimated charged state closest to a target charged state from among the plurality of estimated charged states; and an irradiation unit which controls charged particles and irradiates a charged object with the controlled charged particles, on the basis of control parameters corresponding to the selected estimated charged state.

More Like This:

JP7332985	Static eliminator and flat panel display manufacturing equipment
JP4815548	Discharge countermeasure device
JP4677609	Ionizer with parts expansion device

Inventors:

TAKAHASHI KATSUYUKI (JP)
KIM CHYON HAE (JP)
TAKAKI KOICHI (JP)
KUBO KATSUYA (JP)
KANETA YUKI (JP)
YAMAGUCHI SHINICHI (JP)
HIYOSHI ISAO (JP)
TAKEUCHI RYUICHI (JP)
NAGATA HIDEMI (JP)

Application Number:

PCT/JP2020/045663

Publication Date:

June 17, 2021

Filing Date:

December 08, 2020

Export Citation:

Click for automatic bibliography generation Help

Assignee:

SHISHIDO ELECTROSTATIC LTD (JP)
NATIONAL CORPORATION UNIV IWATE UNIV (JP)

International Classes:

H05F3/04

Foreign References:

JP2006086338A	2006-03-30
JP2018500723A	2018-01-11
JP2017027848A	2017-02-02
JP2003217892A	2003-07-31
JP2016173686A	2016-09-29
JP2009205815A	2009-09-10
JP2016173686A	2016-09-29

Other References: