CHARGED PARTICLE IRRADIATION DEVICE, SYSTEM, METHOD, AND PROGRAM

WIPO Patent Application WO/2021/117718

A1

[Problem] To provide a charged particle irradiation device that can be quickly adapted to a change in an electrified object, the environment, or the like even during operation and that can adaptively perform irradiation with charged particles. [Solution] Provided is a charged particle irradiation device comprising: a pre-irradiation state detection unit for detecting a pre-irradiation electrification state which is an electrification state of an electrified object before irradiation with charged particles; an irradiation time period generation unit for generating a time period of irradiation on the basis of the time period of irradiation with charged particles in the past and the electrification state of the electrified object after the irradiation; an irradiation unit for irradiating, with charged particles, the electrified object in the pre-irradiation electrification state on the basis of the generated irradiation time period; a post-irradiation state detection unit for detecting a post-irradiation electrification state which is the electrification state of the electrified object after being irradiated with charged particles; a machine learning unit for causing a machine learning model to learn a correspondence relationship among the pre-irradiation electrification state, the post-irradiation electrification state, and the generated irradiation time period; and an end determination unit for, until the machine learning model satisfies a learning end condition, causing the pre-irradiation state detection unit, the irradiation time period generation unit, the irradiation unit, the post-irradiation state detection unit, and a learning unit to operate repeatedly.

TAKAHASHI KATSUYUKI (JP)
KIM CHYON HAE (JP)
TAKAKI KOICHI (JP)
KUBO KATSUYA (JP)
KANETA YUKI (JP)
YAMAGUCHI SHINICHI (JP)
HIYOSHI ISAO (JP)
TAKEUCHI RYUICHI (JP)
NAGATA HIDEMI (JP)

PCT/JP2020/045660

June 17, 2021

December 08, 2020

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SHISHIDO ELECTROSTATIC LTD (JP)
NATIONAL CORPORATION UNIV IWATE UNIV (JP)

H05F3/00; H05F3/04

WO2016199282A1

2016-12-15

JP2006086338A	2006-03-30
JP2018500723A	2018-01-11
JP2016173686A	2016-09-29
JP2013247069A	2013-12-09
JP2009205815A	2009-09-10
JP2016173686A	2016-09-29

See also references of EP 4075924A4

IIZUKA Shinichi et al. (JP)

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