Title:
CLEANING APPARATUS AND CLEANING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2023/065435
Kind Code:
A1
Abstract:
Disclosed in the present disclosure are a cleaning apparatus and a cleaning method thereof. The cleaning apparatus comprises a cleaning chamber, a gas generator, a fixing assembly, a cooling assembly, and a recovery assembly; a cooling region, a cleaning region, and a heating region are formed in the cleaning chamber; the gas generator is used for generating a cleaning gas; the fixing assembly is used for fixing a semiconductor structure in the cleaning region; the cooling assembly is used for performing a cooling process on the first surface of the semiconductor structure, so that the cleaning gas entering the graphic region of the second surface of the semiconductor structure is condensed into a cleaning liquid; and the recovery assembly is used for recovering a re-vaporized cleaning liquid.
Inventors:
XI NING (CN)
Application Number:
PCT/CN2021/130537
Publication Date:
April 27, 2023
Filing Date:
November 15, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
B08B3/10
Foreign References:
| CN109332252A | 2019-02-15 | |||
| CN113140488A | 2021-07-20 | |||
| CN104217979A | 2014-12-17 | |||
| CN103650117A | 2014-03-19 | |||
| CN107946178A | 2018-04-20 | |||
| CN101314158A | 2008-12-03 | |||
| CN102969260A | 2013-03-13 | |||
| CN1329748A | 2002-01-02 | |||
| JP2008218877A | 2008-09-18 |
Attorney, Agent or Firm:
BOXIN CHINA INTELLECTUAL PROPERTY (CN)
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