Title:
CLEANING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2013/011761
Kind Code:
A1
Abstract:
A cleaning/purification apparatus (40) cleans an article (51) to be cleaned in a cleaning fluid generated by a plasma generator (1) and, during cleaning finishing, a liquid is injected by a water injection part (60) toward the article (51) to be cleaned.
Inventors:
SANEMATSU WATARU
Application Number:
PCT/JP2012/064516
Publication Date:
January 24, 2013
Filing Date:
June 06, 2012
Export Citation:
Assignee:
PANASONIC CORP (JP)
SANEMATSU WATARU
SANEMATSU WATARU
International Classes:
B08B3/08
Foreign References:
| JP2010069030A | 2010-04-02 | |||
| JPH07243071A | 1995-09-19 | |||
| JP2008178870A | 2008-08-07 | |||
| JP2005296909A | 2005-10-27 | |||
| JP2004008830A | 2004-01-15 | |||
| JP2004268003A | 2004-09-30 |
Attorney, Agent or Firm:
ITO, Masakazu et al. (JP)
Masakazu Ito (JP)
Masakazu Ito (JP)
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Claims:
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