Title:
CLEANING DEVICE, CLEANING METHOD, AND COMPUTER MEMORY MEDIUM
Document Type and Number:
WIPO Patent Application WO/2019/138881
Kind Code:
A1
Abstract:
This cleaning device is for cleaning a workpiece and includes: a rotating body that rotates about an axis which is the radial direction of the washing surface of the workpiece; and a plurality of washing implements that are disposed on the rotating body and that are for washing the washing surface. The plurality of washing implements extend in the axial direction on the surface of the rotating body and are disposed lined up in the circumferential direction of the rotating body.
Inventors:
KODAMA MUNEHISA (JP)
Application Number:
PCT/JP2018/047860
Publication Date:
July 18, 2019
Filing Date:
December 26, 2018
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/304
Foreign References:
| JP2009277925A | 2009-11-26 | |||
| JP2008183659A | 2008-08-14 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
Download PDF: