CLEANING DEVICE AND CLEANING METHOD

WIPO Patent Application WO/2015/030035

A1

A cleaning device is provided with: a venturi tube, which has an introduction part into which is introduced a gas-liquid mixture wherein water and an ozone-containing gas, which is a reactive gas, are mixed, a throat part, which has a smaller internal cross-sectional surface area than the internal cross-sectional surface area of the introduction part and wherein the gas-liquid mixture is compressed and increased in flow rate, and an expanded part having a shape in which the internal cross-sectional surface area expands moving from the throat part toward the direction of travel of the gas-liquid mixture and generating microbubbles by the collapse of bubbles of the reactive gas included in the gas-liquid mixture; and a cleaning jig having a spray part on which a spray outlet for spraying the gas-liquid mixture is provided. The gas-liquid mixture that includes the microbubbles and which is sprayed from the venturi tube is sprayed on an object to be cleaned from the spray outlet and cleans the object to be cleaned. Thus, a cleaning device and cleaning method wherein the cleaning power is high in relation to the amount of ozone used are provided.

ABE YUTAKA (JP)
IKE MASATOSHI (JP)

PCT/JP2014/072383

March 05, 2015

August 27, 2014

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UNIV TSUKUBA (JP)
APPTEX LLC (JP)

B08B3/08; B01F3/04; B01F5/06; B05B7/04; C02F1/78; H01L21/027; H01L21/304

JP2008212788A	2008-09-18
JP2013136024A	2013-07-11
JP2012243950A	2012-12-10
JP2013115357A	2013-06-10
JP2008311256A	2008-12-25
JP2009273966A	2009-11-26
JP2013150007A	2013-08-01
JP2008207099A	2008-09-11
JP2011173038A	2011-09-08
JPS6464322A	1989-03-10

SAKAI, HIROAKI (JP)
Hiroaki Sakai (JP)

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