Title:
COATING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2019/148763
Kind Code:
A1
Abstract:
Provided is a coating apparatus. A position sensor (30) is arranged outside a coating chamber (10) and detects the position of a coating carrier (20) inside the coating chamber (10) through a sensor detection passage (60), thereby preventing the position sensor (30) from being in direct contact with the coating carrier (20) and causing damage to the coating carrier (20), and also preventing the position sensor (30) from being adversely affected by the extreme environment inside the coating chamber (10). Moreover, a protective device (40) is provided to prevent the sensor detection passage (60) from being blocked by a coating, thereby ensuring the normal operation of the position sensor (30).
Inventors:
WANG XIAOWEI (CN)
Application Number:
PCT/CN2018/093288
Publication Date:
August 08, 2019
Filing Date:
June 28, 2018
Export Citation:
Assignee:
BEIJING APOLLO DINGRONG SOLAR TECH CO LTD (CN)
International Classes:
C23C14/35; C23C14/52; C23C14/50
Foreign References:
| CN101930084A | 2010-12-29 | |||
| CN107012441A | 2017-08-04 | |||
| CN101681802A | 2010-03-24 |
Attorney, Agent or Firm:
ACIP LAW OFFICES (CN)
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