Title:
COMPACT INDEPENDENT PRESSURE CONTROL AND VACUUM ISOLATION FOR A TURBOMOLECULAR PUMPED PLASMA REACTION CHAMBER
Document Type and Number:
WIPO Patent Application WO2002095788
Kind Code:
A3
Abstract:
A method and apparatus for use in conjunction with a plasma reaction chamber provide both throttling functionality and independent vacuum isolation for a turbomolecular pump. A throttle valve provides for precise reaction chamber pressure regulation, and a gate valve prevents extended exposure of the turbomolecular pump to atmospheric conditions during cleaning or other maintenance operations. The throttle valve and the gate valve may be actuated independently.
Inventors:
HOLLAND JOHN
BARNES MICHAEL
MAK STEVE S Y
LEAHEY PATRICK
MOHN JONATHAN D
BARNES MICHAEL
MAK STEVE S Y
LEAHEY PATRICK
MOHN JONATHAN D
Application Number:
PCT/US2001/051656
Publication Date:
May 30, 2003
Filing Date:
November 05, 2001
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
International Classes:
H01J37/32; (IPC1-7): H01J37/32; H01J37/18
Foreign References:
| US6041817A | 2000-03-28 | |||
| US6080679A | 2000-06-27 |
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