COMPONENT-MANUFACTURING FILM, COMPONENT-MANUFACTURING TOOL, AND COMPONENT-MANUFACTURING METHOD

Title:

COMPONENT-MANUFACTURING FILM, COMPONENT-MANUFACTURING TOOL, AND COMPONENT-MANUFACTURING METHOD

Document Type and Number:

WIPO Patent Application WO/2018/139612

Kind Code:

A1

Abstract:

The purpose of the present invention is to provide a component-manufacturing film, a component-manufacturing tool, and a component-manufacturing method with which reliable chucking to a chuck table is possible in a heated environment while providing versatility in which shared use in different steps is possible. To address the above: this film 1 has a first region S1 and a second region S2 disposed so as to surround the region S1; the region S1 is formed from a base layer 11 and an adhesive layer 12 provided on one surface side of the base layer 11; the region S2 is formed from the base layer 11, the adhesive layer 12, and an additional layer 13 affixed onto the layer 12. In the temperature range of 190°C or below, the tensile modulus of elasticity of the additional layer 13 is equal to or greater than the tensile modulus of elasticity of the base layer 11. The present method has a component fixing step, a film placement step for performing placement so that the boundary between the region S1 and the region S2 is located on the inner side of the edge of the chuck table, a chucking step, and a heating step.

Inventors:

HAYASHISHITA EIJI (JP)
TAKAHASHI HIROKAZU (JP)
FUKURA KAZUHIDE (JP)

Application Number:

PCT/JP2018/002585

Publication Date:

August 02, 2018

Filing Date:

January 26, 2018

Export Citation:

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Assignee:

MITSUI CHEMICALS TOHCELLO INC (JP)

International Classes:

H01L21/683; B32B15/08; B32B27/00; B32B27/36; C09J7/20; H01L21/301

Domestic Patent References:

WO2017002610A1

2017-01-05

Foreign References:

JP2016032061A	2016-03-07
JPH11111162A	1999-04-23
JP2004217793A	2004-08-05
JPH08330372A	1996-12-13
JP2007005436A	2007-01-11

Other References: