Title:
COMPOSITE CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/030433
Kind Code:
A1
Abstract:
The present invention provides a composite charged particle beam device which is provided with two or more charged particle beam columns and enables high-resolution observation while a sample is placed at the position of a cross point.
The present invention has the following configuration. A composite charged particle beam device is provided with a plurality of charged particle beam columns (101a, 102a), and is characterized in that a sample (103) is disposed at the position of an intersection point (171) where the optical axes of the plurality of columns intersect, a component (408a, 408b) that forms the leading end of an objective lens of the charged particle beam column (102a) is detachable, and by replacing the component (408a, 408b), the distance between the intersection point (171) and the leading end of the charge particle beam column can be changed.
Inventors:
NOMAGUCHI TSUNENORI (JP)
AGEMURA TOSHIHIDE (JP)
AGEMURA TOSHIHIDE (JP)
Application Number:
PCT/JP2013/067965
Publication Date:
February 27, 2014
Filing Date:
July 01, 2013
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/141; H01J37/16; H01J37/28; H01J37/317
Foreign References:
| JP2008123891A | 2008-05-29 | |||
| JPS57118356A | 1982-07-23 | |||
| JP2010157370A | 2010-07-15 | |||
| JP2006012583A | 2006-01-12 | |||
| JP2004014229A | 2004-01-15 | |||
| JP2011258451A | 2011-12-22 | |||
| JP2006114225A | 2006-04-27 |
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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