Title:
SUBSTRATE TRANSPORTATION DEVICE AND SUBSTRATE PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2014/030432
Kind Code:
A1
Abstract:
This substrate transportation device (50), for transporting a substrate (G) between modules, is provided to a common transportation chamber (10) to which a plurality of modules (20, 30a, 30b, 40) are connected. The substrate transportation device (50) is provided with: a base member (51) provided horizontally in the common transportation chamber (10) so as to be capable of turning; a substrate support arm unit (53) for supporting the substrate (G); a support member (54) for supporting the substrate support arm unit (53) so as to be capable of raising or lowering the substrate support arm unit (53), the support member (54) being supported by the base member (51) so as to be capable of horizontal movement; a turning driving part (52) for turning the base member (51); a horizontal driving part (55) for causing the support member (54) to travel horizontally along the base member (51); and a raising/lowering driving part (56) for raising or lowering the substrate support arm unit (53) along the support member (54).
Inventors:
YAMADA YOUHEI (JP)
Application Number:
PCT/JP2013/067766
Publication Date:
February 27, 2014
Filing Date:
June 28, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/677; B25J9/04; B65G49/06
Domestic Patent References:
| WO2008066103A1 | 2008-06-05 |
Foreign References:
| JP2011035103A | 2011-02-17 | |||
| JP2010089203A | 2010-04-22 | |||
| JP2005317656A | 2005-11-10 | |||
| JP2009283548A | 2009-12-03 | |||
| JPH1098085A | 1998-04-14 | |||
| JP2011081367A | 2011-04-21 |
Attorney, Agent or Firm:
TAKAYAMA HIROSHI (JP)
Hiroshi Takayama (JP)
Hiroshi Takayama (JP)
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