Title:
COMPOSITE TUNGSTEN OXIDE FILM AND METHOD FOR PRODUCING SAME, AND FILM-FORMED SUBSTRATE AND ARTICLE EACH PROVIDED WITH SAID FILM
Document Type and Number:
WIPO Patent Application WO/2019/216134
Kind Code:
A1
Abstract:
Provided are: a composite tungsten film which has both of transparency in a visible light region and infrared ray absorbability in an infrared ray region, also has substantial radio wave permeability, and also has a function to absorb light to block the light, a function to absorb light to generate heat and a function to absorb light to emit electrons as well as permeability for light having a wavelength of 700 to 1200 nm; and a method for producing the composite tungsten film. Also provided is a film-formed substrate or article utilizing one function or multiple functions among the above-mentioned functions. A composite tungsten oxide film of which the main component has a chemical composition represented by the general formula: MxWyOz (wherein M represents at least one element selected from an alkali metal, an alkaline earth metal, Fe, In, Tl and Sn; W represents tungsten; and O represents oxygen), wherein the formulae: 0.001 ≤ x/y ≤ 1 and 2.2 ≤ z/y ≤ 3.0 are satisfied, substantially no organic substance component is contained, the sheet resistance is 105 Ω/□ or more, the permeability at a wavelength of 550 nm is 50% or more, the permeability at a wavelength of 1400 nm is 30% or less, the absorptance at a wavelength of 1400 nm is 35% or more, and the absorptance at a wavelength of 800 nm relative to the absorptance at a wavelength of 1400 nm is 80% or less.
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Inventors:
SATO KEIICHI (JP)
ANDO ISAO (JP)
ANDO ISAO (JP)
Application Number:
PCT/JP2019/016401
Publication Date:
November 14, 2019
Filing Date:
April 17, 2019
Export Citation:
Assignee:
SUMITOMO METAL MINING CO (JP)
International Classes:
C23C14/06; C01G41/00; C03C17/245; C23C14/34; C23C14/58
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Attorney, Agent or Firm:
KOIKE Akira et al. (JP)
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