COMPOSITION FOR AND METHOD OF SUPPRESSING TITANIUM NITRIDE CORROSION

Title:

COMPOSITION FOR AND METHOD OF SUPPRESSING TITANIUM NITRIDE CORROSION

Document Type and Number:

WIPO Patent Application WO/2012/051380

Kind Code:

A3

Abstract:

Cleaning compositions and processes for cleaning residue from a microelectronic device having said residue thereon. The composition comprises at least one amine, at least one oxidizing agent, water, and at least one borate species and achieves highly efficacious cleaning of the residue material, including post-ash residue, post-etch residue, post-CMP residue, particles, organic contaminants, metal ion contaminants, and combinations thereof from the microelectronic device while simultaneously not damaging the titanium nitride layers and low-k dielectric materials also present on the device.

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Inventors:

COOPER EMANUEL I (US)
TOTIR GEORGE GABRIEL (US)
PAYNE MAKONNEN (US)

Application Number:

PCT/US2011/056084

Publication Date:

July 12, 2012

Filing Date:

October 13, 2011

Export Citation:

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Assignee:

ADVANCED TECH MATERIALS (US)
COOPER EMANUEL I (US)
TOTIR GEORGE GABRIEL (US)
PAYNE MAKONNEN (US)
IBM (US)

International Classes:

C11D7/32; C09K13/00; G03F7/42; H01L21/027; H01L21/304

Foreign References:

US20030079416A1	2003-05-01
US20050176604A1	2005-08-11
US20060014391A1	2006-01-19
US20090133716A1	2009-05-28
US20090200234A1	2009-08-13

Attorney, Agent or Firm:

FUIERER, Tristan (P.O. Box 13706Research Triangle Park, NC, US)

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