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Title:
COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2022/230874
Kind Code:
A1
Abstract:
The present invention provides a composition for provisional fixation containing the components (A) to (C) described below, the composition being excellent in terms of compatibility, adaptability to spin coating processes, heat resistance, and adaptability to various peeling processes. (A) a bifunctional (meth)acrylate containing no cyclic skeleton (B) a bifunctional (meth)acrylate having a cyclic skeleton (C) a radical photopolymerization initiator

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Inventors:
UCHIDA HAMAGUCHI (JP)
TANIGAWA HOSHINO (JP)
SUDO MEGUMI (JP)
OKUMURA HIROMI (JP)
YOSHIDA JUN (JP)
Application Number:
PCT/JP2022/018883
Publication Date:
November 03, 2022
Filing Date:
April 26, 2022
Export Citation:
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Assignee:
DENKA COMPANY LTD (JP)
International Classes:
C09J4/02; C08F220/20; C09J11/06; H01L21/304
Domestic Patent References:
WO2010010900A12010-01-28
WO2013031678A12013-03-07
WO2020101000A12020-05-22
WO2021235406A12021-11-25
WO2011158654A12011-12-22
WO2020080309A12020-04-23
Foreign References:
JP2014091774A2014-05-19
JP2010248352A2010-11-04
JP2010079958A2010-04-08
JP2004064040A2004-02-26
JP2004064040A2004-02-26
JP2006328104A2006-12-07
JP5890177B22016-03-22
JP2009524705W
JP6139862B22017-05-31
JP2017226785A2017-12-28
JP2019501790W
JP2016500918W
JP4565804B22010-10-20
JP6377956B22018-08-22
JP2016106404A2016-06-16
Attorney, Agent or Firm:
AXIS PATENT INTERNATIONAL (JP)
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