Title:
COMPOUND, RESIN, UNDERLAYER FILM FORMING MATERIAL FOR LITHOGRAPHY, UNDERLAYER FILM FOR LITHOGRAPHY, PATTERN FORMING METHOD AND PURIFICATION METHOD
Document Type and Number:
WIPO Patent Application WO/2016/104214
Kind Code:
A1
Abstract:
A compound which is represented by formula (1).
(In formula (1), each X independently represents an oxygen atom or a sulfur atom, or alternatively represents being non-crosslinked; R1 represents a single bond or a 2n-valent group having 1-30 carbon atoms, said group optionally having an alicyclic hydrocarbon group, a double bond, a heteroatom or an aryl group having 6-30 carbon atoms; each R2 independently represents a linear, branched or cyclic alkyl group having 1-10 carbon atoms, an aryl group having 6-10 carbon atoms, an alkenyl group having 2-10 carbon atoms, an alkoxy group having 1-30 carbon atoms, an aryloxy group having 6-30 carbon atoms, or a hydroxyl group, provided that at least one R2 is an alkoxy group having 1-30 carbon atoms or an aryloxy group having 6-30 carbon atoms; each m independently represents an integer of 1-6; each p independently represents 0 or 1; and n represents an integer of 1-4.)
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Inventors:
TOIDA TAKUMI (JP)
ECHIGO MASATOSHI (JP)
SATO TAKASHI (JP)
MAKINOSHIMA TAKASHI (JP)
ECHIGO MASATOSHI (JP)
SATO TAKASHI (JP)
MAKINOSHIMA TAKASHI (JP)
Application Number:
PCT/JP2015/084907
Publication Date:
June 30, 2016
Filing Date:
December 14, 2015
Export Citation:
Assignee:
MITSUBISHI GAS CHEMICAL CO (JP)
International Classes:
C07D311/78; C08G8/04; C08G18/30; G03F7/11; G03F7/26
Domestic Patent References:
| WO2014199660A1 | 2014-12-18 |
Foreign References:
| JP2013137524A | 2013-07-11 | |||
| JP2013087173A | 2013-05-13 | |||
| JP2014196288A | 2014-10-16 | |||
| JP2013253161A | 2013-12-19 | |||
| JP2010160189A | 2010-07-22 | |||
| JP2006259482A | 2006-09-28 | |||
| JP2013083833A | 2013-05-09 | |||
| US20140363958A1 | 2014-12-11 | |||
| US20140363957A1 | 2014-12-11 | |||
| JP2008201954A | 2008-09-04 |
Other References:
BENTLEY, K.W. ET AL.: "A Synthesis of alpha- Anhydrotrimethylbrazilone", TETRAHEDRON LETTERS, vol. 1, no. Issue 2, 1959, pages 11 - 14, XP055459128
DANN, VON OTTO ET AL.: "Synthesis von (±) - Brasilin", JUSTUS LIEBIGS ANNALEN DER CHEMIE, vol. 667, no. Issue 1, 1963, pages 116 - 125, XP055459130
CHATTERJEA, J. N.: "Experiments on the syntheses of furano compounds. part XII. further transformations of isocoumaranone", JOURNAL OF THE INDIAN CHEMICAL SOCIETY, vol. 34, no. Issue 4, 1957, pages 299 - 305, XP009504132
See also references of EP 3239141A4
DANN, VON OTTO ET AL.: "Synthesis von (±) - Brasilin", JUSTUS LIEBIGS ANNALEN DER CHEMIE, vol. 667, no. Issue 1, 1963, pages 116 - 125, XP055459130
CHATTERJEA, J. N.: "Experiments on the syntheses of furano compounds. part XII. further transformations of isocoumaranone", JOURNAL OF THE INDIAN CHEMICAL SOCIETY, vol. 34, no. Issue 4, 1957, pages 299 - 305, XP009504132
See also references of EP 3239141A4
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
Yoshiyuki Inaba (JP)
Yoshiyuki Inaba (JP)
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