CONDITIONER AND CONDITIONING METHODS FOR SMOOTH PADS

Title:

CONDITIONER AND CONDITIONING METHODS FOR SMOOTH PADS

Document Type and Number:

WIPO Patent Application WO2003082519

Kind Code:

B1

Abstract:

Pad conditioners (15) and methods of conditioning pads for applications such as polishing substrates and chemical mechanical planarization of substrates are provided.

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Inventors:

WEST THOMAS E (US)
WU GUANGWEI (US)
DIETZ DONALD P (US)

Application Number:

PCT/US2003/009329

Publication Date:

December 24, 2003

Filing Date:

March 25, 2003

Export Citation:

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Assignee:

THOMAS WEST INC (US)
WEST THOMAS E (US)
WU GUANGWEI (US)
DIETZ DONALD P (US)

International Classes:

B24B53/007; B24B53/017; B24B53/12; B24D3/32; B24D13/14; (IPC1-7): B24B1/00

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