CONTROL DEVICE, CONTROL METHOD, AND MEASUREMENT DEVICE OF PARALLEL SLIDER DEVICE

WIPO Patent Application WO/2011/111101

A1

Disclosed are a control device, control method, and measurement device of a parallel slider device wherein, in the parallel slider device, two sliders move with smooth motions without mutually interfering with each other. A front-side servo controller (110) for a front-side linear servo motor (72) and a rear-side servo controller (130) for a rear-side linear servo motor (80) are mutually provided with identical position instructions, whereas the control gain is mutually caused to differ between the front-side servo controller (110) and the rear-side servo controller (130).

NAOI, Kaoru (239 Shimohirama, Saiwai-ku, Kawasaki-sh, Kanagawa 60, 〒2128560, JP)
直居薫 (〒60 神奈川県川崎市幸区下平間２３９黒田精工株式会社内 Kanagawa, 〒2128560, JP)
ISHIZAKI, Yoichi (Kuroda Precision Industries Ltd. 132, Chigusa-shinden, Futtsu-sh, Chiba 36, 〒2930036, JP)
石崎洋一 (〒36 千葉県富津市千種新田１３２黒田精工株式会社　富津工場内 Chiba, 〒2930036, JP)

JP2010/001715

September 15, 2011

March 10, 2010

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KURODA PRECISION INDUSTRIES LTD. (239 Shimohirama, Saiwai-ku Kawasaki-sh, Kanagawa 60, 〒2128560, JP)
黒田精工株式会社 (〒60 神奈川県川崎市幸区下平間２３９ Kanagawa, 〒2128560, JP)
NAOI, Kaoru (239 Shimohirama, Saiwai-ku, Kawasaki-sh, Kanagawa 60, 〒2128560, JP)
直居薫 (〒60 神奈川県川崎市幸区下平間２３９黒田精工株式会社内 Kanagawa, 〒2128560, JP)
ISHIZAKI, Yoichi (Kuroda Precision Industries Ltd. 132, Chigusa-shinden, Futtsu-sh, Chiba 36, 〒2930036, JP)

G05D3/00; G01B21/00; G05D3/12

OSHIMA, Yoichi (IP Building, 2-20Kanda-Jimbocho,,Chiyoda-k, Tokyo 51, 〒1010051, JP)

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