Title:
PARALLEL SLIDER DEVICE OF PNEUMATIC LINEAR GUIDE METHOD, CONTROL METHOD OF SAME, AND MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/111100
Kind Code:
A1
Abstract:
Disclosed is a pneumatic linear guide method parallel slider device, a control method of the same, and a measurement device wherein, in a parallel slider device using pneumatic linear guides, when two sliders are mechanically coupled, reduction in reproducibility of parallelism, caused by the mechanical rigidity of the coupling portion of the sliders and the air bearing rigidity of the air slide mechanism mutually affecting each other, is eliminated to ensure highly accurate parallelism reproducibility. By causing the sizes of the air gaps and the supply air pressures to differ between a first pneumatic linear guide (48) and a second pneumatic linear guide (54), a difference is generated in slider support rigidity (air bearing rigidity), thereby causing absorption of the straightness error caused by air gap variation to be performed reliably upon the side with lower air bearing rigidity.
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Inventors:
NAOI KAORU (JP)
ISHIZAKI YOICHI (JP)
INOUCHI TATSUHITO (JP)
SEKIGUCHI KOICHI (JP)
ISHIZAKI YOICHI (JP)
INOUCHI TATSUHITO (JP)
SEKIGUCHI KOICHI (JP)
Application Number:
PCT/JP2010/001714
Publication Date:
September 15, 2011
Filing Date:
March 10, 2010
Export Citation:
Assignee:
KURODA PRECISION IND LTD (JP)
NAOI KAORU (JP)
ISHIZAKI YOICHI (JP)
INOUCHI TATSUHITO (JP)
SEKIGUCHI KOICHI (JP)
NAOI KAORU (JP)
ISHIZAKI YOICHI (JP)
INOUCHI TATSUHITO (JP)
SEKIGUCHI KOICHI (JP)
International Classes:
G05D3/00; F16C32/06; G01B21/00
Foreign References:
| JP2007146995A | 2007-06-14 | |||
| JPH04347008A | 1992-12-02 | |||
| JPH11351857A | 1999-12-24 | |||
| JPH05215133A | 1993-08-24 | |||
| JPH06330944A | 1994-11-29 | |||
| JPS58177245A | 1983-10-17 | |||
| JP2008067463A | 2008-03-21 |
Attorney, Agent or Firm:
OSHIMA, YOICHI (JP)
Yoichi Oshima (JP)
Yoichi Oshima (JP)
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Claims: