Title:
CONTROL DEVICE, CONTROL METHOD, AND MEASUREMENT DEVICE OF PARALLEL SLIDER DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/111101
Kind Code:
A1
Abstract:
Disclosed are a control device, control method, and measurement device of a parallel slider device wherein, in the parallel slider device, two sliders move with smooth motions without mutually interfering with each other. A front-side servo controller (110) for a front-side linear servo motor (72) and a rear-side servo controller (130) for a rear-side linear servo motor (80) are mutually provided with identical position instructions, whereas the control gain is mutually caused to differ between the front-side servo controller (110) and the rear-side servo controller (130).
Inventors:
NAOI KAORU (JP)
ISHIZAKI YOICHI (JP)
INOUCHI TATSUHITO (JP)
IWASAKI MASAHIRO (JP)
ISHIZAKI YOICHI (JP)
INOUCHI TATSUHITO (JP)
IWASAKI MASAHIRO (JP)
Application Number:
PCT/JP2010/001715
Publication Date:
September 15, 2011
Filing Date:
March 10, 2010
Export Citation:
Assignee:
KURODA PRECISION IND LTD (JP)
NAOI KAORU (JP)
ISHIZAKI YOICHI (JP)
INOUCHI TATSUHITO (JP)
IWASAKI MASAHIRO (JP)
NAOI KAORU (JP)
ISHIZAKI YOICHI (JP)
INOUCHI TATSUHITO (JP)
IWASAKI MASAHIRO (JP)
International Classes:
G05D3/00; G01B21/00; G05D3/12
Foreign References:
| JP2005099981A | 2005-04-14 | |||
| JPH11351857A | 1999-12-24 | |||
| JP2008067463A | 2008-03-21 |
Attorney, Agent or Firm:
OSHIMA, YOICHI (JP)
Yoichi Oshima (JP)
Yoichi Oshima (JP)
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Claims: