Title:
CONVEYANCE DEVICE AND EXPANSION-AMOUNT CALCULATION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/239266
Kind Code:
A1
Abstract:
In the present invention, an articulated arm is configured so that a plurality of arms are connected by rotatable joints, and by rotating the joints, the articulated arm can be extended and contracted. A detection unit detects the angle of rotation of the joints of the articulated arm, for different postures the number of which is at least the number of arms of the articulated arm. A calculation unit calculates the expansion amount of each of the plurality of arms on the basis of the angle of rotation of the joints at each of the postures detected by the detection unit.
Inventors:
KODAMA TOSHIAKI (JP)
MATSUMOTO WATARU (JP)
MATSUMOTO WATARU (JP)
Application Number:
PCT/JP2021/029661
Publication Date:
November 17, 2022
Filing Date:
August 11, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
B25J9/06; H01L21/677
Foreign References:
| JPH01264786A | 1989-10-23 | |||
| JP2017183483A | 2017-10-05 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
Download PDF: