Title:
CORROSION-RESISTANT MEMBER
Document Type and Number:
WIPO Patent Application WO/2024/024584
Kind Code:
A1
Abstract:
The corrosion-resistant member according to the present disclosure is a multilayer body comprising a substrate and a first layer laminated on the substrate. The first layer comprises a rare earth element compound containing a rare earth element as a main metal element component. In the first layer, the crystallinity in a region closer to the substrate is smaller than that in a region farther from the substrate. Alternatively, the corrosion-resistant member according to the present disclosure comprises a substrate, a compound layer laminated on the substrate and comprising a metal element M, and a first layer laminated on the compound layer. The first layer comprises a rare earth element compound containing a rare earth element as a main metal element component. In the compound layer, crystallinity is uniform. In the first layer, the crystallinity in a region closer to the substrate is smaller than that in a region farther from the substrate.
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Inventors:
ISHIKAWA KAZUHIRO (JP)
TANIGUCHI TOMOKI (JP)
TANIGUCHI TOMOKI (JP)
Application Number:
PCT/JP2023/026341
Publication Date:
February 01, 2024
Filing Date:
July 19, 2023
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
C04B41/87; C04B41/89; C23C14/08; H01L21/3065; H05H1/00
Domestic Patent References:
| WO2020116384A1 | 2020-06-11 | |||
| WO2020218265A1 | 2020-10-29 | |||
| WO2019026818A1 | 2019-02-07 |
Foreign References:
| JP2013095644A | 2013-05-20 |
Attorney, Agent or Firm:
BUNA PATENT ATTORNEYS (JP)
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