COVER-CARRYING THIN SHEET STORAGE CONTAINER

WIPO Patent Application WO/1998/056676

A1

A cover-carrying thin sheet storage container (1) provided with a container body (2) in which a plurality of silicon wafers are held and supported, and a cover (3) removably fitted to the container body (2) and sealing the interior thereof. A magnetic force control member (11) for controlling a magnetic force between the container body (2) and cover (3) is also provided. The magnetic force control member (11) is provided with magnets (8, 22) respectively disposed in mutually opposed positions of the container body (2) and cover (3) and driving means (23) for moving the magnets (22). When the magnets (22) are aligned with the magnets (8) by the driving means (23), the magnets are attracted to each other to fix the cover (3) to the container body (2). When the magnets (22) are put out of alignment with the magnets (8), the cover (3) is released from the container body-fixing force, and becomes easily removable. The cover (3) is provided with a seal member (14) having a tongue (14A). This tongue (14A) seals the interior of the container body reliably without causing the inner air pressure to increase. The magnets mentioned above may be replaced by coils (52) and magnetic members.

HYOBU YUKIHIRO (JP)

PCT/JP1997/002044

December 17, 1998

June 13, 1997

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KAKIZAKI MANUFACTURING CO LTD (JP)
HYOBU YUKIHIRO (JP)

H01L21/673; (IPC1-7): B65D43/02; B65D55/02; B65D85/38; B65D85/90; H01L21/68

JPH03215960A	1991-09-20
JPH06183467A	1994-07-05
JPH0627954Y2	1994-07-27
JPS60160539U	1985-10-25
JPS63131948U	1988-08-29
JPH0196860U	1989-06-27
JPH0945759A	1997-02-14
JPH0185292U	1989-06-06
JPS6287442U	1987-06-04

Kudoh, Nobuyuki (41-8 Minami-Ikebukuro 2-chom, Toshima-ku Tokyo 171, JP)

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