Title:
CRYOPUMP
Document Type and Number:
WIPO Patent Application WO/2018/147181
Kind Code:
A1
Abstract:
A cryopump (10) is equipped with: a refrigerator (16) that is equipped with a high-temperature cooling stage and a low-temperature cooling stage; a radiation shield (30) that is thermally coupled to the high-temperature cooling stage and extends, with a cylindrical shape, in the axial direction from a cryopump intake port; a low-temperature cryopanel portion that is thermally coupled to the low-temperature cooling stage and surrounded by the radiation shield (30), and that is equipped with a plurality of cryopanels (60) which are arranged in the axial direction and include a top cryopanel (60a) disposed closest to the cryopump intake port; and an entrance cryopanel (32) that is thermally coupled to the high-temperature cooling stage, is disposed on the cryopump intake port, and forms a top cryopanel housing compartment (74).
Inventors:
TAKAHASHI KAKERU (JP)
Application Number:
PCT/JP2018/003573
Publication Date:
August 16, 2018
Filing Date:
February 02, 2018
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
International Classes:
F04B37/16; F04B37/08
Foreign References:
| JPH10213065A | 1998-08-11 | |||
| JP2014227989A | 2014-12-08 |
Attorney, Agent or Firm:
MORISHITA Sakaki (JP)
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