Title:
DELAFOSSITE-TYPE Cu COMPOSITE OXIDE FILM AND COMPOSITE MATERIAL
Document Type and Number:
WIPO Patent Application WO/2020/066926
Kind Code:
A1
Abstract:
Provided is a high performance, p-type, delafossite-type Cu composite oxide film. This delafossite-type Cu composite oxide film comprises a crystalline structure having a composition represented by general formula CuXO2 (wherein X is at least one element selected from the group consisting of Al, Ga, Fe, Cr, and Mn), and the crystalline structure contains H atoms at a concentration of 1 × 1018 atoms/cm3.
Inventors:
HAYAKAWA TOMOKATSU (JP)
YOSHIKAWA JUN (JP)
MATSUSHIMA KIYOSHI (JP)
NANATAKI TSUTOMU (JP)
YOSHIKAWA JUN (JP)
MATSUSHIMA KIYOSHI (JP)
NANATAKI TSUTOMU (JP)
Application Number:
PCT/JP2019/037060
Publication Date:
April 02, 2020
Filing Date:
September 20, 2019
Export Citation:
Assignee:
NAGOYA INST TECH (JP)
NGK INSULATORS LTD (JP)
NGK INSULATORS LTD (JP)
International Classes:
C30B29/22; C01G3/00; C23C14/08; C30B7/10; H01L21/363; H01L21/368
Domestic Patent References:
| WO2018060237A1 | 2018-04-05 |
Foreign References:
| US20160133751A1 | 2016-05-12 | |||
| JPH11278834A | 1999-10-12 | |||
| JP2001210864A | 2001-08-03 | |||
| JP2000228516A | 2000-08-15 | |||
| US20030201164A1 | 2003-10-30 |
Attorney, Agent or Firm:
TAKAMURA Masaharu et al. (JP)
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