Title:
DAMPER CONTROL SYSTEM AND DAMPER CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2020/241848
Kind Code:
A1
Abstract:
The present invention relates to a damper control system and damper control method for controlling the opening degree of an exhaust damper connected to an exhaust duct. This damper control system (300) includes an exhaust damper (310), a first pressure sensor (311), and a control device (315) that controls the opening degree of the exhaust damper (310). The control device (315) switches the opening degree of the exhaust damper (310) to an opening degree smaller than a full-open position, on condition that the shutter (217) is open.
Inventors:
IMAMURA AKIRA (JP)
MIYAZAKI MITSURU (JP)
KUNISAWA JUNJI (JP)
MIYAZAKI MITSURU (JP)
KUNISAWA JUNJI (JP)
Application Number:
PCT/JP2020/021418
Publication Date:
December 03, 2020
Filing Date:
May 29, 2020
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
F24F7/007; H01L21/304; H01L21/677
Foreign References:
| JP2000286219A | 2000-10-13 | |||
| JP2009036425A | 2009-02-19 | |||
| JP2006078086A | 2006-03-23 |
Attorney, Agent or Firm:
HIROSAWA, Tetsuya et al. (JP)
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