Title:
DC POWER SOURCE, AND DC POWER SOURCE CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2015/045197
Kind Code:
A1
Abstract:
This DC power source for supplying DC power to a plasma generating device has a simple and more compact device configuration for forming a high voltage for generating plasma discharge. A process is repeated multiple times in which a short-circuit current is passed for a very short time to a voltage-type step-down chopper unit provided in the DC power source and the energy is stored in a reactor; the energy stored in the reactor is discharged to an output capacitance, gradually boosting the output voltage, thereby boosting the output voltage to an ignition set voltage. The short-circuit current is formed using a switching element in a step-up circuit provided in the DC power source. By repeatedly boosting the voltage of the output terminal by storing and discharging short-circuit currents, the voltage at the output terminal of the DC power source is boosted to the ignition set voltage.
Inventors:
YUZURIHARA ITSUO (JP)
KODAMA SHINICHI (JP)
ADACHI TOSHIYUKI (JP)
KODAMA SHINICHI (JP)
ADACHI TOSHIYUKI (JP)
Application Number:
PCT/JP2013/084823
Publication Date:
April 02, 2015
Filing Date:
December 26, 2013
Export Citation:
Assignee:
KYOSAN ELECTRIC MFG (JP)
International Classes:
H05H1/46; C23C14/34; H02J1/00; H02M3/155; H02M3/158; H02M1/00
Foreign References:
JP2002173772A | 2002-06-21 | |||
JP2006006053A | 2006-01-05 | |||
JP2010225308A | 2010-10-07 | |||
JP2005050711A | 2005-02-24 | |||
JP2010255061A | 2010-11-11 | |||
JPH11229138A | 1999-08-24 | |||
JP2002173772A | 2002-06-21 | |||
JP2012072854W | 2012-09-07 |
Other References:
See also references of EP 2947971A4
Attorney, Agent or Firm:
SHIONOIRI, Akio (JP)
Akio Shionoiri (JP)
Akio Shionoiri (JP)
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