Title:
DEFECT CLASSIFICATION METHOD, APPARATUS AND DEVICE, AND STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2022/126865
Kind Code:
A1
Abstract:
The present application relates to a defect classification method, apparatus and device, and a storage medium, the method comprising: reading a defect image a defect of which is currently to be classified, a reference image and a defect location; obtaining a difference image according to the defect image and reference image, and extracting a specific feature from the difference image, the specific feature corresponding to a defect type a defect of which is currently to be classified; and inputting the extracted specific feature into a trained classifier, and according to the specific feature, the classifier performs defect classification on the defect image. During defect classification, the specific feature corresponding to the defect type is extracted from the difference image, and a corresponding defect classification is performed on the basis of the extracted specific feature, thus accurately distinguishing defect types, such that defect cause analysis may be accurately carried out, and thus improving yield and increasing production.
Inventors:
LIU CHENGCHENG (CN)
HAN CHUNYING (CN)
YU ZONGQIANG (CN)
LI QIANG (CN)
MA WEIMIN (CN)
HAN CHUNYING (CN)
YU ZONGQIANG (CN)
LI QIANG (CN)
MA WEIMIN (CN)
Application Number:
PCT/CN2021/078757
Publication Date:
June 23, 2022
Filing Date:
March 02, 2021
Export Citation:
Assignee:
DONGFANG JINGYUAN ELECTRON LTD (CN)
International Classes:
G06N3/02
Foreign References:
| CN103811369A | 2014-05-21 | |||
| CN101661169A | 2010-03-03 | |||
| CN103218961A | 2013-07-24 |
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