Title:
DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2021/199397
Kind Code:
A1
Abstract:
This defect inspection apparatus (100) comprises: an illumination unit (101) that irradiates the upper surface of a sample (1) with a linear illumination spot; a condensing detection unit (102) which includes a telecentric optical system, condenses reflected light of the illumination spot from the surface of the sample (1), controls a polarization state of incident light, and forms an optical image; and a sensor unit (103) that outputs, as an electric signal, the optical image of the illumination spot through the condensing detection unit (102) and includes a light reception unit and a reflection prevention film at a position conjugated with the illumination spot with which the surface of the sample (1) is irradiated, wherein the condensing detection unit (102) includes a polarization control unit that increases the efficiency of light incident onto the light reception unit of the sensor unit. The normal of a light receiving surface of the sensor unit (103) is tilted by at least 10 degrees and at most 80 degrees from the optical axis of the condensing detection unit (102). The condensing detection unit (102) increases the optical magnification of the illumination spot in the lateral direction to reduce the variation in the incident angle towards the sensor unit (103) in the lateral direction with respect to the longitudinal direction of the illumination spot.
Inventors:
HONDA TOSHIFUMI (JP)
URANO YUTA (JP)
ARIMA EIJI (JP)
YAMAKAWA HIROMICHI (JP)
MATSUMOTO SHUNICHI (JP)
KANAI HISAAKI (JP)
URANO YUTA (JP)
ARIMA EIJI (JP)
YAMAKAWA HIROMICHI (JP)
MATSUMOTO SHUNICHI (JP)
KANAI HISAAKI (JP)
Application Number:
PCT/JP2020/015161
Publication Date:
October 07, 2021
Filing Date:
April 02, 2020
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N21/956
Domestic Patent References:
| WO2013094121A1 | 2013-06-27 | |||
| WO2013161912A1 | 2013-10-31 | |||
| WO2019064991A1 | 2019-04-04 |
Foreign References:
| JP2007033433A | 2007-02-08 | |||
| JP2015197320A | 2015-11-09 | |||
| JP2014534611A | 2014-12-18 | |||
| JPH10123429A | 1998-05-15 | |||
| JP2009236791A | 2009-10-15 | |||
| JP2016027342A | 2016-02-18 |
Attorney, Agent or Firm:
ISONO INTERNATIONAL PATENT OFFICE, P.C. (JP)
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