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Title:
DEFLECTOR MECHANISM CAPABLE OF REDUCING PHASE DIFFERENCE, AND SCANNING ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2022/246884
Kind Code:
A1
Abstract:
The present application relates to a deflector mechanism capable of reducing a phase difference, comprising a rotatable deflector, a connection rod, a fixed deflector, and a mounting portion. The central axis of rotation of the rotatable deflector coincides with the central axis of the fixed deflector, and the rotatable deflector and the fixed deflector are separately mounted on the mounting portion; the rotatable deflector is rotatably connected to the mounting portion; one end of the connection rod is rotatably connected to the rotatable deflector, and the connection rod can drive the rotatable deflector to rotate; the fixed deflector is fixedly connected to the mounting portion. The rotatable deflector is driven to rotate by moving the connection rod; after adjustment, a designed included angle between the rotatable deflector and the fixed deflector reaches a pre-designed angle such that a scanning electron microscope using the deflector mechanism of the present application achieves optimal resolution, and the phase difference is reduced as much as possible. In addition, compared with mechanical mounting, by means of fine-adjustment of the rotatable deflector, the designed included angle between the rotatable deflector and the fixed deflector has a higher precision, and thus, the problem that the mounting precision of the two deflectors cannot be ensured only by means of mechanical mounting is effectively solved.

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Inventors:
LI SHUAICHEN (CN)
JIANG LEI (CN)
SUN WEIQIANG (CN)
MENG QINGLANG (CN)
JIANG JUNHAI (CN)
Application Number:
PCT/CN2021/097999
Publication Date:
December 01, 2022
Filing Date:
June 02, 2021
Export Citation:
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Assignee:
ZHONGKE JINGYUAN ELECTRON LTD BEIJING CO LTD (CN)
International Classes:
H01J37/20; F16M11/04; F16M11/18; G01N23/04
Foreign References:
CN103700562A2014-04-02
CN109300760A2019-02-01
CN215335289U2021-12-28
US6630668B12003-10-07
Attorney, Agent or Firm:
BEIJING DINGLI DONGSHEN INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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