DEOXIDIZING AND PURIFYING METHOD FOR MO SOURCE - JIANGSU NATA OPTO ELECT MAT CO LTD

Title:

DEOXIDIZING AND PURIFYING METHOD FOR MO SOURCE

Document Type and Number:

WIPO Patent Application WO/2023/226629

Kind Code:

A1

Abstract:

The present invention relates to the technical field of semiconductor materials, and provides a deoxidizing and purifying method for an MO source. The method comprises the following steps: selecting a hydroboron as a reducing agent; and deoxidizing an MO source by using the reducing agent. The deoxidizing and purifying method for an MO source has the advantages of good purifying effects, reduced possibility of side reactions, and simple process procedure, and no new impurity being introduced.

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Inventors:

XING HUAIYONG (CN)
ZHU YI (CN)
GUO JINYUAN (CN)
CUI ANMIN (CN)
LI FANGFANG (CN)
CHANG HUA (CN)
CHEN HUABING (CN)

Application Number:

PCT/CN2023/089015

Publication Date:

November 30, 2023

Filing Date:

April 18, 2023

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Assignee:

JIANGSU NATA OPTO ELECT MAT CO LTD (CN)

International Classes:

C07F5/06; C07F5/00

Foreign References:

CN114773372A	2022-07-22
JPH0267230A	1990-03-07
CN109879900A	2019-06-14
CN1749260A	2006-03-22

Attorney, Agent or Firm:

SUZHOU 3IN INTELLECTUAL PROPERTY AGENT CO., LTD. (CN)

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