Title:
DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/024306
Kind Code:
A1
Abstract:
This detection device comprises: a vibrator 10 provided with a sensitive film 16; a heater 18 that heats the sensitive film; a detector 28 that detects a detection value regarding the resonance frequency of the vibrator; a control unit that causes the heater to start heating of the sensitive film, acquires a first detection value detected by the detector in a state where the sensitive film is heated, and causes the heater to stop the heating of the sensitive film on the basis of the first detection value and a first reference value; and a calculation unit that acquires, after the heating of the sensitive film has been stopped, a second detection value, of a measurement target, detected by the detector, and calculates determination information regarding a gas on the basis of the second detection value.
Inventors:
KANETO TOMOAKI (JP)
Application Number:
PCT/JP2023/021878
Publication Date:
February 01, 2024
Filing Date:
June 13, 2023
Export Citation:
Assignee:
TAIYO YUDEN KK (JP)
International Classes:
G01N5/02
Foreign References:
| JP2019015675A | 2019-01-31 | |||
| JP2020176989A | 2020-10-29 | |||
| JP2012220454A | 2012-11-12 | |||
| JP2021001785A | 2021-01-07 | |||
| JP2020098113A | 2020-06-25 | |||
| JP2012242279A | 2012-12-10 | |||
| US20060257286A1 | 2006-11-16 |
Attorney, Agent or Firm:
KATAYAMA, Shuhei (JP)
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