Title:
DETECTION METHOD OF MANUFACTURING PROCESS DATA, COMPUTER-READABLE MEDIUM, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/048236
Kind Code:
A1
Abstract:
A detection method of manufacturing process data, a computer-readable medium, and an electronic device, the detection method comprising: determining manufacturing method data of a newly-added manufacturing method (S100); according to the manufacturing process data of the newly-added manufacturing process, by means of a first production system detecting whether an acceptable level of a wafer vector type of the newly-added manufacturing process and a corresponding manufacturing process station match, and if labels of the newly-added manufacturing process and the corresponding manufacturing process station match (S200); if said labels do not match, then the detection does not pass, and first detection information is outputted (S300); if the two labels match, then by means of a second production system, detecting whether an acceptable level of a wafer vector type of the newly-added manufacturing process and a corresponding manufacturing process station match, and if labels of the newly-added manufacturing process and the corresponding manufacturing process station match (S400); if after the second production system detection there is not a match, then the detection does not pass, outputting second detection information (S500). The provided detection method is capable of proactively avoid stopping the productive line because of errors setting manufacturing process data.
Inventors:
CHEN DANDAN (CN)
HSIEH MING-HUNG (CN)
SU SHENG-HUA (CN)
HSIEH MING-HUNG (CN)
SU SHENG-HUA (CN)
Application Number:
PCT/CN2021/100447
Publication Date:
March 10, 2022
Filing Date:
June 16, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
G06Q10/06; H01L21/00
Foreign References:
| CN100507782C | 2009-07-01 | |||
| CN1455436A | 2003-11-12 | |||
| CN1455437A | 2003-11-12 | |||
| US20080021585A1 | 2008-01-24 |
Attorney, Agent or Firm:
BEIJING INTELLEGAL INTELLECTUAL PROPERTY AGENT LTD. (CN)
Download PDF: