DETOXIFYING SYSTEM, DETOXIFYING DEVICE, AND SYSTEM CONTROL DEVICE

WIPO Patent Application WO/2020/031990

A1

[Problem] To continue detoxifying processing even if centralized management of a detoxifying system by a particular system control device becomes difficult. [Solution] A plurality of system control devices 22m, 22s are each provided with a network interface 51 for communicating with each other via a network 41. One of the system control devices serves as a master system control device and the remainder function as a slave system control device. The master system control device transmits a control command to the slave system control device with the network interface 51. The slave system control device receives the control command with the network interface 51, and supplies an operation command to detoxifying devices 1-1, 1-2 in accordance with the control command. If unable to communicate with the master system control device, the slave system control device functions as the master system control device or transitions to standalone operation.

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KOBAYASHI KENICHIRO (JP)
ADRIAN FISHER (GB)
CHRISTOPHER PETER JONES (GB)
PHILIP CARR (GB)

PCT/JP2019/030790

February 13, 2020

August 05, 2019

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EDWARDS JAPAN LTD (JP)
EDWARDS LTD (GB)

H01L21/02; G05B9/02

JP2010528475A	2010-08-19
JP2007312043A	2007-11-29
JPH10312968A	1998-11-24

See also references of EP 3836191A4

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