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Title:
DEVICE FOR PRODUCING EXCITED AND/OR IONISED PARTICLES IN A PLASMA AND METHOD FOR PRODUCING IONISED PARTICLES
Document Type and Number:
WIPO Patent Application WO2005062335
Kind Code:
A3
Abstract:
The invention relates to a device for producing excited and/ or ionised particles in a plasma, comprising a generator (11) which is used to produce an electromagnetic wave and an excitation chamber (20) comprising a plasma area wherein the excited and/or ionised particles are formed. At least one stimulation chamber is arranged in an insulating material (18) in an off-centre position in relation to an annular-cylindrical outer conductor (17).

Inventors:
GSCHWANDTNER ALEXANDER (DE)
MATHUNI JOSEF (DE)
MATTHEUS ALEXANDER (DE)
SCHNEIDER STEPHAN (DE)
SELLMAIER JUERGEN (DE)
STEINHARDT HEINZ (AT)
Application Number:
PCT/EP2004/011119
Publication Date:
October 20, 2005
Filing Date:
October 05, 2004
Export Citation:
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Assignee:
R3T GMBH RAPID REACTIVE RADICA (DE)
GSCHWANDTNER ALEXANDER (DE)
MATHUNI JOSEF (DE)
MATTHEUS ALEXANDER (DE)
SCHNEIDER STEPHAN (DE)
SELLMAIER JUERGEN (DE)
STEINHARDT HEINZ (AT)
International Classes:
H01J37/32; H05H1/30; H05H1/46; (IPC1-7): H01J37/32; H05H1/46
Domestic Patent References:
WO2003015122A12003-02-20
Foreign References:
EP0334184A21989-09-27
DE19847848C12000-05-11
DE19608949A11997-09-11
Other References:
PATENT ABSTRACTS OF JAPAN vol. 013, no. 288 (E - 781) 30 June 1989 (1989-06-30)
PATENT ABSTRACTS OF JAPAN vol. 013, no. 232 (E - 765) 29 May 1989 (1989-05-29)
PATENT ABSTRACTS OF JAPAN vol. 1995, no. 04 31 May 1995 (1995-05-31)
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